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Three Zone Split Tube Furnace (Cvd)
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Product Description
Three Zone Split Tube Furnace (Cvd)
- Number of zone :One/Two /Three Zone (as per user requirement)
- Heating temperature range : Upto1200 C/1400 C
- Heating Element: A-1/Silicon Carbide
- Temperature accuracy : +/-1 C
- Furnace tube size : ID = 60 mm /OD =65mm/ length= 1200 mm
- Quartz tube with couplers :High purity fused quartz
- Size:ID =60mm, OD=65mm,length=1200mm
- Heating rate : 15 C per Minute (max.) or user settable Each Hot Zone length : 200 mm length
- Display : 7 LCD Touch Screen HMI to control all vital operation of CVD i.e. temperature and gas flow. With Data logging of temperature and gas flow.
- Construction : Horizontal and split type
- Insulation : Vacuum formed Zirconia fiber
- Shell Construction : MS body fabricated from 20/18 gauge sheet, powder coated for superior finish. Double layer body for low surface temp.
- Temperature control : ( 1x16=16 segment) PID programmable Digital Temperature controller x 3 no. (separate for each zone)
- Temperature sensor : 3 numbers (k type-1200 C/R type-1400 C)
- Power control : Through the phase angle controlled SSRUnit/Thyristor Unit
Gas purging arrangement
- Digital vacuum gauge wih vacuum display upto 10-6 torr.
- Gas mixing chamber : One unit kept between the Rotameters and the furnace
- Furnace stand to height of 1 meter
OPTIONAL:-
- Chiller with Circulation Pump
- Gas Cylinder with Regulator
- Mass flow controller for different gases, flow rate upto 500 sccm or as required with digital display (Optional)
- Rotameter for different gases with needle valve.
- Centrifuges ystems
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